To understand the coupled motion between linear and
rotational motion of 3-axis actuator, generalized
actuator modeling was constructed, and from the
planar vector model of actuator, expanded equation
of motion, which could describe 3-axis motion was
built. From the equation of motion, 3x3 transfer
function matrix was obtained, and coupling behavior
was observed. To analyze the coupling behavior,
singular value decomposition of transfer function
matrix was applied and led to the conclusion that
rotational motion strongly influenced linear motion.
Therefore, to obtain decoupling...