The industrial demand for smaller structures required for the manufacture of quantum devices and high density recording media have resulted in the need for fabrication technology at the nanometer scale. It is shown in this text that laser/microstructure interaction can break the diffraction limit, creating nanoscale surface modifications in both localized and parallel fashions. Two fundamental problems required for predictive optical nanolithography are addressed here: the electrodynamic response of laser energy in the vicinity of micro/nanostructures, and the resulting energy...
The industrial demand for smaller structures required for the manufacture of quantum devices and high density recording media have resulted ...