Micro fuel cells based on porous silicon membranes are developed and characterized in this work and are demonstrated to be a promising candidate for powering portable electronic instruments. First, different pore morphologies of porous silicon are explored. The pore morphologies are characterized using scanning electron microscopy. The pore sizes can be controlled to range from microns to nanometers. Proton conductivities of porous silicon membranes are derived using impedance spectroscopy. It is shown that pore morphology determines the transport property of the porous silicon membrane...