This work focused on addressing the need for the development of a renewable power source for wireless sensor nodes via energy scavenging using thin film piezoelectrics. The novality of this research is the growth of epitaxial PZT on a Si platform. The films were grown with good consistency using pulsed laser deposition. Using the optimized piezoelectric film properties, an analytical and finite element model was generated to predict the output power for a single unimorph, 5.5 nW/beam, and over a cubic cm, 80-200 microWatts/cm3. A microfabrication technique was developed to manufacture the...