The ability to selectively deposit thin films of lithium and remove them from surfaces is an emerging area of technology development in various fields including EUV lithography, lithium ion battery development, and in the fusion community. A lithium magnetron source was developed for lithium deposition and characterized to yield a mapping of the temperature and density of the plasma, ionization fraction, and lithium deposition. From here, a secondary plasma source was developed and studied in the same manner to also provide information on the electron density, temperature, and ionization...
The ability to selectively deposit thin films of lithium and remove them from surfaces is an emerging area of technology development in various fields...