Semiconductor Industry is the main driving force for technology innovation and "New Economy" markets. The ongoing development of faster integrated circuits with higher device density has led to highly complex and sophisticated products which are widely accepted by society. A modern integrated circuit cannot be developed without the massive use of computer aided design (CAD) in any step of the complex flow from the idea to the final product. This work concentrates on technology computer aided design (TCAD) and its integration into the semiconductor fabrication process flow. An analysis of the...