"Thin-film microoptics" stands for novel types of microoptical components and systems which combine the well-known features of miniaturized optical elements with the specific advantages of thin optical layers. This approach enables for innovative solutions in shaping light fields in spatial, temporal and spectral domain. Low-dispersion and small-angle systems for tailoring and diagnosing laser pulses under extreme conditions as well as VUV-capable microoptics can be realized. Continuous-relief microstructures of refractive, reflective and hybrid characteristics are obtained by vapor...