A compendium of otherwise scattered information on the physics involved in the construction and operation of semiconductor devices at the submicron level. Addressed to people who make such devices, and assumes a solid understanding of solid state physics and electronics, and at least a familiarity w

The purposes of this book are many. First, we must point out that it is not a device book, as a proper treatment of the range of important devices would require a much larger volume even without treating the important physics for submicron devices. Rather, the book is written principally to pull together and present in a single place, and in a (hopefully) uniform treatment, much of the understanding on relevant physics for submicron devices. Indeed, the understand- ing that we are trying to convey through this work has existed in the literature for quite some time, but has not been brought to...