After earlier meetings in Enschede (NL, 1994), Basel (CH, 1996) and Banff (CDN, 1998), muTAS 2000 is the fourth international symposium on the subject of miniaturized techniques, methods, devices and systems for (bio)chemical analysis and synthesis. Initially started as a minor sub-topic in the large field of Micro System Technology (MST or MEMS), the field of muTAS is currently generally considered as one of the most important application areas of MST, which is reflected in the still rapidly growing research, development, and, above all, commercialization activities. Apart from further...

The MESA Research Institute of the University of Twente was created in 1990 through the joining of the research unit Sensors and Actuators with the department of Microelectronics. The multidisciplinary institute, with participation from the faculties of Electrical Engineering, Applied Physics and Chemical Technology, was recently recognized as a Centre of Excellence by the Dutch Science Foundation. It is fully 2 equipped with modem Clean Room facilities (1000 m ) and a number of research laboratories. The objective of MESA is to perform research and development of systems in modem information...

In the rapidly developing information society there is an ever-growing demand for information-supplying elements or sensors. The technology to fabricate such sensors has grown in the past few decades from a skilful activity to a mature area of scientific research and technological development. In this process, the use of silicon-based techniques has appeared to be of crucial importance, as it introduced standardized (mass) fabrication techniques, created the possibility of integrated electronics, allowed for new transduction principles, and enabled the realization of micromechanical...