Nanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been developed which are capable of making structures below 100nm.
Principles of each technology are introduced and illustrated with minimum mathematics involved. The capabilities of each technology in making sub-100nm structures are described. The limits of preventing a technology from further going down the dimensional scale are analyzed.
Drawing upon years of practical experience and using numerous examples, Zheng Cui covers...
Nanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been ...
This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale.
This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. Also analyzed are...