The proceedings of the first "Workshop on Technology CAD Systems is an authoritative tutorial on CAD software systems for the physical design of semiconductor devices and manufacturing processes. Fourteen invited papers by academic and industrial representatives from USA, Europe, and Japan, as well as from commercial software vendors provide an excellent overview of the work in this area. This book covers the following topics: Coupling and integration of process simulation, device simulation, parameter extraction, and circuit simulation, technology CAD requirements, architectures and...