This book presents a basic introduction to micromechanisms and microactuators, particularly to their basic configurations and design. This book fills the persisting gap in the published literature on the mechanical manipulative aspects of micromechanisms. It also helps in offering specialized introductory courses on micromechanisms and microactuators not as part of MEMS sensing devices, but as mechanical manipulative systems. The level of the book is suitable for use in both undergraduate and introductory graduate programmes. The book presents an overview of miniaturization and scaling laws,...

This book presents a basic introduction to micromechanisms and microactuators, particularly to their basic configurations and design. The book presents an overview of miniaturization and scaling laws, basic design principles of micro-sized mechanisms and actuators, micro-fabrication processes, and some futuristic issues.