For four decades the evolution of integrated circuits has followed Moore s law, according to which the number of transistors per square millimeter of silicon doubles every 18 months. At the same time transistors have become faster, making possible ever-increasing clock rates in digital circuits. This trend seems set to continue for at least another decade without slowing down. Thus, in the near future the processing power of digital circuits will continue to increase at an accelerating pace. For analog circuits the evolution of technology is not as beneficial. Thus, there is a trend to move...

Micromachined scanning mirrors are interesting for a wide variety of applications because of their potential low cost, high speed, low power consumption, and reliability. These mirrors can offer significant advantages over macro-scale mirrors, but the fundamental limitations of scanning mirrors have not been widely discussed.
Miniaturization in electronic systems has led to radical improvements in computers and communications, and micromachining technologies promise to generate such improvements in miniaturized mechanical and optical systems, including specifically higher-speed, smaller,...