The series Advances in Industrial Control aims to report and encourage technology transfer in control engineering. The rapid development of control technology has an impact on all areas of the control discipline. New theory, new controllers, actuators, sensors, new industrial processes, computer methods, new applications, new philosophies ..., new challenges. Much of this development work resides in industrial reports, feasibility study papers and the reports of advanced collaborative projects. The series offers an opportunity for researchers to present an extended exposition of such new work...

The series Advances in Industrial Control aims to report and encourage technology transfer in control engineering. The rapid development of control technology has an impact on all areas of the control discipline. New theory, new controllers, actuators, sensors, new industrial processes, computer methods, new applications, new philosophies ..., new challenges. Much of this development work resides in industrial reports, feasibility study papers and the reports of advanced collaborative projects. The series offers an opportunity for researchers to present an extended exposition of such new work...

Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 10⁵, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g., scanning probe microscopy), and robot/machine tools to carry out micro-assembly (e.g., micro-electro-mechanical systems) and delicate short-wavelength laser processes.

Precision Motion Control (second edition) focuses on enabling technologies for precision engineering...