Monitoring hazardous gases is highly complex, yet critical to semiconductor manufacturing. This book includes excerpts from codes and standards relevant to the industry, including the latest editions of model fire codes. This guide provides the basics to successfully comply with code requirements.

The guidelines in this book go beyond minimum design standards to ensure that best industry practices are employed to address the many safety, environmental and economic concerns of hazardous occupancy facilities. System certification, redundancy and integration of gas sensors into a monitoring,...