Although the existence of the surface acoustic wave (SAW) was first dis cussed in 1885 by Lord Rayleigh 1], it did not receive engineering interest for a long time. In 1965, the situation changed dramatically. White suggested that SAWs can be excited and detected efficiently by using an interdigital transducer (IDT) placed on a piezoelectric substrate 2]. This is because very fine IDTs can be mass-produced by using photolithography, which has been well developed for semiconductor device fabrication, and proper design of the IDT enables the construction of transversal filters with...
Although the existence of the surface acoustic wave (SAW) was first dis cussed in 1885 by Lord Rayleigh 1], it did not receive engineering interest f...