In the rapidly developing information society there is an ever-growing demand for information-supplying elements or sensors. The technology to fabricate such sensors has grown in the past few decades from a skilful activity to a mature area of scientific research and technological development. In this process, the use of silicon-based techniques has appeared to be of crucial importance, as it introduced standardized (mass) fabrication techniques, created the possibility of integrated electronics, allowed for new transduction principles, and enabled the realization of micromechanical...
In the rapidly developing information society there is an ever-growing demand for information-supplying elements or sensors. The technology to fabrica...
The use of silicon-based microsystems for chemical analysis is one of the most promising concepts in the recent developments in micro system technology (MST). It is expected that chemical sensors will be increasingly integrated in so-called miniaturized total analysis systems (uTAS), a concept first presented by Ciba-Geigy. In such systems, all steps in a chemical determination, from sampling to detection and data treatment, are integrated in one miniature instrument. uTAS offer a variety of advantages over conventional analysis systems such as improved analytical performance, reduced reagent...
The use of silicon-based microsystems for chemical analysis is one of the most promising concepts in the recent developments in micro system technolog...
