Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

BioNanoFluidic MEMS explains biosensor development fundamentals and initiates an awareness in engineers and scientists who would like to develop and implement novel biosensors for agriculture, biomedicine, home land security, environmental needs, and disease identification. In addition, the material covered in this book introduces and lays the basic foundation for design, fabrication, testing, and implemention of next generation biosensors through hands-on learning.

BioNanoFluidic MEMS explains biosensor development fundamentals and initiates an awareness in engineers and scientists who would like to develop and implement novel biosensors for agriculture, biomedicine, home land security, environmental needs, and disease identification. In addition, the material covered in this book introduces and lays the basic foundation for design, fabrication, testing, and implemention of next generation biosensors through hands-on learning.