This book contains the proceedings of the International "Workshop on 3D Process Simulation which was held at the Campus of the University Erlangen-Nuremberg in Erlangen on September 5, 1995, in conjunction with the 6th International Conference on "Simulation of Semiconductor Devices and Processes (SISDEP 95). Whereas two-dimensional semiconductor process simulation has achieved a certain degree of maturity, three-dimensional process simulation is a newly emerging field in which most efforts are dedicated to necessary basic developments. Research in this area is promoted by the growing demand...