This book presents an updated, systematic review of the latest developments in diamond CVD processes, with emphasis on the nucleation and early growth stages of diamond CVD. The objective of this book is to familiarize the reader with the scientific and engineering aspects of diamond CVD, and to provide experienced researchers, scientists, and engineers in academic and industrial communities with the latest developments in this growing field. The scope of the book encompasses the developments and applications of diamond CVD, starting with a brief description of atomic and crystal structures...