This unique monograph discusses all aspects of the design and operation of electrophysical ultrahigh-vacuum pumps (EUVP). The adsorption-diffusion model of interaction of gas molecules with metal getters is presented, together with getter films sorption characteristics. A mathematical model of molecular transfer in electrophysical pumps and the principles and criteria of their energy and structural-geometrical optimization are proposed; and the physical processes in the pumps are analyzed during the pumping out of both active and inert gases. Also presented are the generic and specific...