Based on lecture notes that have been used by the authors for the past ten years, with revisions made each year, this book is aimed at graduate students as well as professionals and researchers involved in thin-film physics and technology. The first part of the book introduces the concept, describes the various deposition procedures and illustrates PVD methods, evaporation and sputtering. The basic physical processes of film formation are then analyzed and formulated, including methods for monitoring and measuring film thickness. This book also shows how the subject matter connects with,...
Based on lecture notes that have been used by the authors for the past ten years, with revisions made each year, this book is aimed at graduate studen...