Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important...
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two auth...
TO THE SECOND EDITION In the nine years since this book was first written, rapid progress has been made scientifically in nuclear fusion, space physics, and nonlinear plasma theory. At the same time, the energy shortage on the one hand and the exploration of Jupiter and Saturn on the other have increased the national awareness of the important applications of plasma physics to energy production and to the understanding of our space environment. In magnetic confinement fusion, this period has seen the attainment 13 of a Lawson number nTE of 2 x 10 cm -3 sec in the Alcator tokamaks at MIT;...
TO THE SECOND EDITION In the nine years since this book was first written, rapid progress has been made scientifically in nuclear fusion, space physic...
This book grew out of lecture notes for an undergraduate course in plasma physics that has been offered for a number of years at UCLA. With the current increase in interest in controlled fusion and the wide- spread use of plasma physics in space research and relativistic as- trophysics, it makes sense for the study of plasmas to become a part of an undergraduate student's basic experience, along with subjects like thermodynamics or quantum mechanics. Although the primary purpose of this book was to fulfill a need for a text that seniors or juniors can really understand, I hope it can also...
This book grew out of lecture notes for an undergraduate course in plasma physics that has been offered for a number of years at UCLA. With the curren...
