Composite systems that integrate microelectromechanical and microelectrofluidic (MEF) components with electronics are emerging as the next generation of system-on-a-chip (SOC) designs. However, there remains a pressing need for a structured methodology for MEFS design automation, including modeling techniques and simulation and optimization tools.
Integrating top-down and bottom-up design philosophies, Microelectrofluidic Systems presents the first comprehensive design strategy for MEFS. This strategy supports hierarchical modeling and simulation from the component level to the system...

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other...

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.