SISDEP-95 provides an international forum for the presentation of state-of-the-art research and development results in the area of numerical process and device simulation. Continuously shrinking device dimensions, the use of new materials, and advanced processing steps in the manufacturing of semiconductor devices require new and improved software. The trend towards increasing complexity in structures and process technology demands advanced models describing all basic effects and sophisticated two and three dimensional tools for almost arbitrarily designed geometries. The book contains the...
SISDEP-95 provides an international forum for the presentation of state-of-the-art research and development results in the area of numerical process a...
The conference ESSDERC '89 held in September 1989 in Berlin was concerned with the physics, electrical characteristics, reliability and processing of solid state devices and electronic materials. The proceedings contain all invited and contributed papers of the conference and thus becomes a state-of-the-art-report of solid state device research in Europe 1989.
The conference ESSDERC '89 held in September 1989 in Berlin was concerned with the physics, electrical characteristics, reliability and process...
SISDEP 95 provides an international forum for the presentation of state-of-the-art research and development results in the area of numerical process and device simulation. Continuously shrinking device dimensions, the use of new materials, and advanced processing steps in the manufacturing of semiconductor devices require new and improved software. The trend towards increasing complexity in structures and process technology demands advanced models describing all basic effects and sophisticated two and three dimensional tools for almost arbitrarily designed geometries. The book contains the...
SISDEP 95 provides an international forum for the presentation of state-of-the-art research and development results in the area of numerical process a...
In den letzten Jahren erschienen bereits mehrere Bucher zum Thema Ionenimplanta tion, die sich fast ausschliesslich an auf dem Gebiet der Ionenimplantation tatige Wissenschaftler wenden und deshalb der Theorie einen sehr breiten Raum einraumen. Im Gegensatz hierzu wendet sich das vorliegende Werk weniger an den Implanta tionsfachmann, sondern mehr an Forscher und Entwickler in Industrie, F or schungslaboratorien und Hochschulen, die an der Ionenimplantation als neuem Hilfsmittel zur Veranderung von Materialeigenschaften interessiert sind und wissen wollen, ob die Ionenimplantation fur ihr...
In den letzten Jahren erschienen bereits mehrere Bucher zum Thema Ionenimplanta tion, die sich fast ausschliesslich an auf dem Gebiet der Ionenimplant...
