M. A. Lieberman Michael A. Lieberman Alan J. Lichtenberg
A Thorough Update of the Industry Classic on Principles of Plasma Processing
The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals.
The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of...
A Thorough Update of the Industry Classic on Principles of Plasma Processing
The first edition of Principles of Plasma Discharges and Mat...