Micromachined scanning mirrors are interesting for a wide variety of applications because of their potential low cost, high speed, low power consumption, and reliability. These mirrors can offer significant advantages over macro-scale mirrors, but the fundamental limitations of scanning mirrors have not been widely discussed.
Miniaturization in electronic systems has led to radical improvements in computers and communications, and micromachining technologies promise to generate such improvements in miniaturized mechanical and optical systems, including specifically higher-speed, smaller,...