Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

This volumes presents recent results in the physics and chemistry of nanostructures, nano-technology, and nano-size optical and electron devices. The level of understanding of the nanoworld is apparent from the book.

The book contains impressive results obtained in the XX-th century and discussion of next challenges of the XXI-st century in understanding of the nanoworld. The main sections of the book are: (1) Physics of Nanostructures, (2) Chemistry of Nanostructures. (3) Nanotechnology, (4) nanostructure Based Devices.

PhD students, academics, researchers and industrialists in nanotechnology.

This comprehensive volume presents invited reviews and short notes with exciting new results obtained in fabrication study and application of nanostructures, which promise a new generation of electronic and optoelectronic devices. The rapid progress in nanoelectronics and optoelectronics, molecular electronics and spintronics, nanotechnology and quantum processing of information are covered.