Layered metal-insulator-semiconductor microstructures have become an important research area in semiconductor microelectronics. New devices utilize phenomena occuring at or near the semiconductor surface directly.

This monograph provides a survey of the diverse experimental and theoretical results for electron and hole transport in surface and subsurface regions of semiconductors, with an emphasis on the mechanisms involved and special measurement procedures necessary, for example in Hall current measurements.

This English edition has been substantially revised and updated from the original...