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This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies—the longstanding technology driver of Si ULSI—as they advance from the 1 Kbit to the Gbit DRAM era.

This book focuses on the rapid progress in state-of-the-art dynamic random access memory (DRAM) technology as it has advanced from the Kilo-bit to the Giga-bit regime. Compiled by a panel of experts from the ULSI Process Technology Research and Development Unit at Toshiba Corporation, it provides the reader with the latest information on DRAM technology. This title begins with an overview of recent progress and trends in device technology, particularly the scaling of MOSFETs and DRAM memory cell structures. Various process technologies from lithography to Si wafer technology are described in...