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The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of...

The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing

The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need.

Each of the Handbook's eight chapters is related to a...