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This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental...

Published in 1935, George Santayana's The Last Puritan was the American philosopher's only novel. It became an instant best-seller, immediately linked in its painful voyage of self discovery to The Education of Henry Adams. It is essentially a novel of ideas, expressed in the birth, life, and early death of Oliver Alden.The Last Puritan is volume four in a new critical edition of The Works of George Santayana that restores Santayana's original text and provides important new scholarly information. Books in this series - the first complete publication of Santayana's works - include an...