ISBN-13: 9783540421504 / Angielski / Miękka / 2001 / 1806 str.
ISBN-13: 9783540421504 / Angielski / Miękka / 2001 / 1806 str.
The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.