Microelectromechanical Systems -- Materials and Devices: Volume 1052

ISBN-13: 9781558999909 / Angielski / Twarda / 2008 / 325 str.

David A. Lavan; D. Lavan; M. Spearing

Opis

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Spis treści

Preface; Part I. Micromechanics I; Part II. Micromechanics II; Part III. Poster Session; Part IV. MEMS Devices I; Part V. MEMS Devices II; Part VI. Poster Session: MEMS; Part VII. MEMS Materials and Processes I; Part VIII. MEMS Materials and Processes II; Part IX. Select Paper from Symposium N; Author index; Subject index.