Integrated Circuit Fabrication

ISBN-13: 9781032014296 / Angielski / Twarda / 2021 / 336 str.

Kumar Shubham; Ankaj Gupta

Opis

This book covers theoretical and practical aspects of all major steps in the fabrication sequence. The effect is to give the book an analysis flavor: a number of loosely related topics each with its own background material.
Note: T& F does not sell or distribute the Hardback in India, Pakistan, Nepal, Bhutan, Bangladesh and Sri Lanka.

Spis treści

1. Introduction to Silicon Wafer Processing 2. Epitaxy 3. Oxidation 4. Lithography 5. Etching 6. Diffusion 7. Ion Implantation 8. Film Deposition: Dielectric, Polysilicon and Metallization 9. Packaging 10. VLSI Process Integration