Contamination Control and Cleanrooms: Problems, Engineering Solutions, and Applications

ISBN-13: 9781468465143 / Angielski / Miękka / 2012 / 424 str.

Alvin Lieberman

Opis

Contamination control standards and techniques for all phases of the production of high-technology products are spelled out in this applications-orientated guide. Practical cleaning methods for products and process fluids are accompanied by tips on selecting operations based on economy and efficiency. Explanations of contaminant measurement devices cover operation, error sources and remedial methods. Engineers will find vital data on contaminant sources, as well as coverage of operations and procedures that aggravate contaminant effects.

Spis treści

Contamination control overview. Particulate contaminants, descriptions and definitions. Particle effects on products. Gases, films, chemicals and other contaminants. Contaminant sources. Contaminant generation mechanisms. Contaminant transport and deposition mechanisms. Product protection methods summary. Liquids cleaning methods. Gas cleaning methods, ambient air and compressed gases. Surface cleaning methods. Standards for contamination control areas. CC validation and monitoring requirements. Standards for CC testing systems. Cleanroom design bases and allowable components. HVAC and filter systems for cleanrooms. Cleanroom support components. Maintenance, cleaning and janitorial needs. Component and equipment testing. Personnel selection and training. Cleanroom work procedures. Clothing, globes and wipers. Air sampling considerations. Optical particle counter operation. Calibration and correlation methods for OPCs. Optical particle counter operation. Filter testing methods. Liquids cleaning overview. Liquid contamination measurement.