Singer, Wolfgang

Wolfgang Singer was born in 1964 and studied Physics at the University of Erlangen. He received his Ph.D. at the Institute of Applied Optics in 1995 with a thesis on microoptics, propagation theory and tomography. He spent his post doctorate at the Institute de Microtechnique in Neuchatel, where he developed diffractive diffusors for DUV illumination systems. From 1996 to 1998, he was assistant at the Institute of Applied Optics at the University of Stuttgart. Since 1998, he has been with Carl Zeiss SMT AG, working in the department of optical design and simulation for lithographic optics. His...