Chen, Francis F.

Prof. Chen is a plasma physicist with a career extending over 48 years and encompassing both experiment and theory. He has devoted about a decade each to the subfields of magnetic fusion, laser fusion, plasma diagnostics, basic plasma physics, and low-temperature plasma physics. Most plasma students are familiar with his textbook Introduction to Plasma Physics and Controlled Fusion. His current interest is in plasma processing of semiconductor circuits, especially the radiofrequency sources used to make computer chips, and in the physical processes that permit etching millions of transistors o...