User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition

ISBN-13: 9781499211931 / Angielski / Miękka / 2014 / 254 str.

U. S. Department of Commerce

Opis

The Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material property measurements. RM 8096 was fabricated on a multiuser 1.5 m complementary metal oxide semiconductor (CMOS) process followed by a bulkmicromachining etch. Material properties of the composite oxide layer are reported on the RM Report of Investigation and described within this guide.3 RM 8097 was fabricated using a polysilicon multi-user surface-micromachining MEMS process with a backside etch. The material properties of the first or second polysilicon layer are reported on the RM Report of Investigation and described within this guide.

Zawartość książki może nie spełniać oczekiwań – reklamacje nie obejmują treści, która mogła nie być redakcyjnie ani merytorycznie opracowana.