Theory and Application of Laser Chemical Vapor Deposition

ISBN-13: 9780306449369 / Angielski / Twarda / 1995 / 396 str.

J. Mazumder;Mazumder; Aravinda Kar

Opis

In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.

Spis treści

Introduction. Pyrolytic LCVD. Photolytic LCVD. Pyrolytic LCVD Modeling. Photolytic LCVD Modeling. Appendix A: Definitions of Energy Density, Irradiance, and Intensity. Appendix B: Thermal Stress Analysis. Appendix C: Volumetric Absorption Rate. Appendix D: Physical Constants and Conversion Factor. Index.