The Physics of Micro/Nano-Fabrication

ISBN-13: 9780306441462 / Angielski / Twarda / 1993 / 622 str.

Ivor Brodie; Julius J. Muray; Julius J. Muray

Opis

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Spis treści

1. Preliminary Survey.- 2. Particle Beams: Sources, Optics, and Interactions.- 3. Plasmas: Physics and Chemistry.- 4. Layering Technologies.- 5. Pattern Generation.- 6. Microcharacterization.- 7. Limits to Nanofabrication.- Appendixes.- Author Index.