The Physical Properties of Thin Metal Films

ISBN-13: 9780415283908 / Angielski / Twarda / 2003 / 230 str.

Raymond Bonnett; G. P. Zhigal'skii; Zhigal'skii Zhigal'skii

Opis

Thin films of conducting materials, such as metals, alloys and semiconductors are currently in use in many areas of technology, particularly in modern integrated circuit microelectronics. This volume presents the complex physical properties particular to thin conducting films, including the necessary theory, confirming experiments and applications.

Spis treści

Conduction in Discontinuous Films. Size-effects in Thin Metal Films. Internal Mechanical Stresses and Voids in Thin Metal Films. Electrical Noise in Thin Films and Thin-Film Structures. Non-linear Conduction and Non-Equilibrium Noise in Thin Films. Degradation Mechanisms in Thin Metal Films.

O autorze

G. P. Zhigal'skii, B. K. Jones