ISBN-13: 9780863417436 / Angielski / Miękka / 2007 / 456 str.
ISBN-13: 9780863417436 / Angielski / Miękka / 2007 / 456 str.
The first book to deal with a broad spectrum of process and device design, and modeling issues related to semiconductor devices, bridging the gap between device modelling and process design using TCAD. Presents a comprehensive perspective of emerging fields and covers topics ranging from materials to fabrication, devices, modelling and applications. Aimed at research-and-development engineers and scientists involved in microelectronics technology and device design via Technology CAD, and TCAD engineers and developers.