Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments

ISBN-13: 9783658192372 / Angielski / Miękka / 2017 / 316 str.

Alexey Ivanov

Opis

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime.

Spis treści

Silicon Anodization: State of the Art.- Experimental, Characterization and Simulation Methods.- Microscale Study of Anodization Process.- Anodization Process as a Structuring Technique: Experiments and Simulation.​

O autorze

Alexey Ivanov is currently working  as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

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Blurb

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

Contents

• Silicon Anodization: State of the Art
• Experimental, Characterization and Simulation Methods
• Microscale Study of Anodization Process
• Anodization Process as a Structuring Technique: Experiments and Simulation
  

Target Groups

• Researchers and students of microsystems technology, electrochemistry, microengineering
• Practitioners in the area of microsystems, silicon processing and electrochemical material processing
  

<The Author
Alexey Ivanov is currently working  as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

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