Scanning Probe Lithography: Fundamentals, Materials, and Applications

ISBN-13: 9781032122144 / Angielski / Twarda / 2022 / 184 str.

Javier Martinez Rodrigo

Opis

This work details the modalities, mechanisms, technologies, applications, and materials on which Scanning Probe Lithography can be performed. It provides an overview of this simple and cost-effective technique, which can be performed in any lab or facility to achieve high-resolution and high-quality patterns on a wide range of 2D materials.

Spis treści

1. Historical Background and Positioning in the Lithography Roadmap. 2. Basic Concepts and Modalities. 3. Mechanical Scanning Probe Lithography. 4. Dip Pen Nanolithography. 5. Field Emission Scanning Probe Lithography. 6. Oxidation Scanning Probe Lithography. 7. Thermal Scanning Probe Lithography. 8. Lithography Using an Scanning Tunneling Microscope. 9.  High Throughput Strategies.