Retroreflex Ellipsometry for Nonplanar Surfaces

ISBN-13: 9783731514022 / Angielski / Miękka / 210 str.

Chia-Wei Chen

Opis

Retroreflex ellipsometry addresses the geometric restrictions of conventional ellipsometry by using a retroreflective sheet, which returns the light beam from the sample on the same beam path. Simulation and experiments of retroreflex ellipsometry in two- and three-phase systems have been demonstrated based on the proposed concepts, which have shown the capabilities of ellipsometric measurements on nonplanar surfaces.