Quantitative Data Processing in Scanning Probe Microscopy: Spm Applications for Nanometrology

ISBN-13: 9780128133477 / Angielski / Miękka / 2018 / 416 str.

Klapetek, Petr (Czech Metrology Institute)

Opis

Scanning Probe Microscopy (SPM) techniques have potential to produce information about various local physical properties. Unfortunately, there is still a large gap between what is measured by commercial devices and what could be considered as a quantitative result. Data processing is a large part of the whole measurement procedure in SPMs and in many cases it can help to pick the quantitative data out of the measured signal. On the other hand, if the processing is done improperly, the information can be lost and even features not existing in the data can be introduced. This book describes the recommended practices for measurements and data processing for various SPM techniques, discusses associated numerical techniques, and recommends further reading for particular physical quantities measurements. Each chapter has been revised and updated for this new edition, to reflect the progress that has been made in SPM techniques in recent years. This will make the book more useful for practical use. New features for this edition include more step by step examples, better sample data and more links to related documentation in the open source software

• Features step-by-step guidance to aid readers in progressing from a general understanding of SPM principles to mastering complex data measurement techniques or processing specific modes and regimes of present SPMs
• Includes a focus on metrology aspects of measurements, arming readers with a solid grasp of instrumentation and measuring methods accuracy
• Worked examples show quantitative data processing for different SPM analytical techniques

Spis treści

1. Motivation2. Instrumentation Principles3. Data Models4. Basic Data Processing5. Dimensional Measurements6. Force and Mechanical Properties7. Friction and Lateral Forces8. Electrostatic Fields9. Magnetic Fields10. Local Current Measurements11. Thermal Measurement12. Optical Measurements13. Sample Data Files14. Numerical Modeling Techniques