Plasma Applications for Material Modification: From Microelectronics to Biological Materials

ISBN-13: 9789814877350 / Angielski / Twarda / 2021 / 310 str.

Tabarés, Francisco L.

Opis

This book is an up-to-date review of the most important plasma-based techniques for material modification, from microelectronics to biological materials and from fusion plasmas to atmospheric ones. Written by experienced, internationally recognised researchers, it provides insight into plasma technology and its associated elemental processes.

Spis treści

1. Introduction

F. Gordillo & F.L. Tabarés  

2. Plasma-Enhanced Chemical Vapour Deposition of Thin Films

C. Corbella, O. Sánchez & J.M. Albella 

3. Deposition of Porous Nanocolumnar Thin Films by Magnetron Sputtering

R. Alvarez, A.R. González-Elipe & A. Palmero 

4. Generation of Atomic Species by RF Plasmas and Applications

R. Zaplotnik, G. Primc, D. Paul, M. Mozetič, J. Kovač & A. Vesel 

5. Surface Modification by Fusion Plasmas

M. Rubel , S. Brezinsek & A. Widdowson 

6. First Wall Conditioning by Plasma Techniques

F L Tabarés, D. Tafalla & T. Wauters 

7. Cold Atmospheric Pressure Plasma Jets and Their Applications 

G. Dinescu & M. Teodorescu 

8. Plasmas in Odontology

S. Laurencin-Dalicieux, M. Georgelin-Gurgel, J.Larribe, A. Dubuc & S. Cousty

O autorze

Francisco Tabarés is full professor at the Fusion National Laboratory, Centro de Investigaciones Energéticas, Medioambientales y Tecnológicas, Spain. He graduated in chemistry from the University Complutense, Madrid (UCM), Spain, in 1977 and obtained a doctoral degree in chemical physics from the same university in 1983. From 1984 to 1986, he was a Fulbright postdoctoral scholar at the University of California, Santa Barbara, USA. He was also assistant professor at the Physical Chemistry Department of the UCM, vice president of the Spanish Vacuum Society, president of the Plasma Physics specialised group of the Spanish Royal Society of Physics and coordinator of the Fusion Plasma division in the Spanish Ministry of Science and Research. He joined the Fusion National Laboratory in 1987, where he has been the leader of the Plasma Wall Interaction team for 33 years. Dr. Tabarés has published more than 200 articles in peer-reviewed journals and written 1 book and 6 book chapters. He has pioneered several research works at the international level, including atomic beam–based edge plasma diagnostics and novel plasma-based techniques for the cleaning and tritium control of fusion devices.