ISBN-13: 9781138600805 / Angielski / Twarda / 2018 / 322 str.
ISBN-13: 9781138600805 / Angielski / Twarda / 2018 / 322 str.
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.