Physics of Radiofrequency Capacitive Discharge

ISBN-13: 9780367571627 / Angielski / Miękka / 2020 / 322 str.

V. P. Savinov

Opis

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.

Spis treści

Foreword

Introduction

Abbreviations

1. Main physical properties and characteristics of radiofrequency capacitive discharge

2. Physical properties of near-electrode layers of space charge of RF capacitive discharge

3. Edge effects in the RF capacitive discharge

4. Near-electrode electron beams in RF capacitive discharge

5. Physical properties of RF gas discharge plasma

References

Index

O autorze

V. P. Savinov